Journal of Vacuum Science & Technology A, Vol.16, No.4, 2173-2176, 1998
Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction
The electron velocity distribution function is measured for the E x B (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (T-e approximate to 2 eV) shifted in the E x B direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (T-e approximate to 0.5 eV), Maxwellian bulk with energetic, asymmetric tails.