화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.16, No.4, 2501-2504, 1998
Preparation of (001) cube textured CeO2 buffer layers on rolling-textured substrates by ion beam assisted pulsed laser deposition
An approach to deposit (001) oriented, in-plane-aligned CeO2 buffer layer on rolling-assisted biaxially-textured nickel tapes by ion beam assisted deposition is reported. The CeO2 films grown on the rolling-textured nickel tapes by pulsed laser deposition without ion bombardment show (111) orientation. CeO2 films grown on the rolling-textured nickel tapes by ion beam assisted pulsed laser deposition without introducing hydrogen are (001) oriented at deposition temperature below about 380 degrees C. The full width at half maximum of (111) phi-scan of the (001) cub textured CeO2 films is 9 degrees. The films growing at higher temperature are (111) orientation, no matter they are deposited with ion bombardment or without ion bombardment.