Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.16, No.5, 3142-3144, 1998 DOI10.1116/1.581473 Export Citation Study on TiNx films and Ti target surface nitrided by rf dc coupled reactive magnetron sputtering Suzuki M, Tanaka T, Kawabata K Keywords:THIN-FILMS;KINETICS;TITANIUM Please enable JavaScript to view the comments powered by Disqus.
