Journal of Vacuum Science & Technology A, Vol.17, No.1, 319-321, 1999
A new and simple variable-angle accessory for infrared specular reflectance
A simple, low-cost accessory (patent pending) with only two flat mirrors and a new variable-angle mechanism has been developed for infrared specular reflectance measurements. The system allows the angles of incidence to be varied continuously from 15 degrees (near normal incidence) to 85 degrees (near grazing angle) without losing the alignment of the accessory. The reflectivity of boron nitride thin films deposited on metallic substrates has been measured at different angles of incidence to demonstrate the utility of this accessory.