화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.17, No.2, 615-618, 1999
Velocity distribution of organic molecules emitted from effusion cells measured by time-of-flight technique
Velocity distribution of the molecules emitted from effusion cells commonly used in molecular beam epitaxy was measured by using time-of-flight technique. The result for organic molecular phthalocyanine can be fitted by a shifted Maxwellian distribution. The effects of the temperature and the aspect ratios of the sources are discussed.