Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.17, No.2, 662-664, 1999 DOI10.1116/1.582027 Export Citation Chemical and structural alterations induced at Kapton (R) surfaces by air exposures following atomic oxygen or 1 keV Ar+ treatments Wolan JT, Hoflund GB Keywords:MASS-SPECTROMETRY Please enable JavaScript to view the comments powered by Disqus.