A series of CoPt/ZrO2 catalysts using plasma treatment to modify ZrO2 support and/or to decompose the cobalt precusor were prepared. The nanostructure and properties of the supports and catalysts were characterized by N-2-physisorption, SEM, TEM, XRD, XPS, H-2-TPR and H-2-TPD, and the catalytic performance of four catalysts was evaluated by Fischer-Tropsch synthesis (FTS) reaction. Characterization results showed that defects were created and morphology change was achieved on ZrO2 support by plasma modification. The synegetic effect of plasma support modification and precursor decomposition resulted in extremely high dispersion of cobalt species (similar to 1 nm), these highly dispersed cobalt particles also had improved reduction ablibity, and thus a plentiful number of active sites were generated, despite its lower TOF value, a highest apparent FT activity was presented.