화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.31, No.10, 546-551, October, 2021
유리-PZT 혼합 후막의 절연 파괴 전압 및 에너지 저장 효율 향상
Enhancing Breakdown Strength and Energy Storage Efficiency of Glass-Pb(Zr,Ti)O3 Composite Film
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To improve ferroelectric properties of PZT, many studies have attempted to fabricate dense PZT films. The AD process has an advantage for forming dense ceramic films at room temperature without any additional heat treatment in low vacuum. Thick films coated by AD have a higher dielectric breakdown strength due to their higher density than those coated using conventional methods. To improve the breakdown strength, glass (SiO2-Al2O3-Y2O3, SAY) is mixed with PZT powder at various volume ratios (PZT-xSAY, x = 0, 5, 10 vol%) and coating films are produced on silicon wafers by AD method. Depending on the ratio of PZT to glass, dielectric breakdown strength and energy storage efficiency characteristics change. Mechanical impact in the AD process makes the SAY glass more viscous and fills the film densely. Compared to pure PZT film, PZT-SAY film shows an 87.5% increase in breakdown strength and a 35.3 % increase in energy storage efficiency.
  1. Ma B, Kwon DK, Narayanan M, Balachandran UB, Mater. Lett., 62, 3573 (2008)
  2. Campbell CK, Wyk JDV, Chen R, IEEE Trans. Compon. Packag. Manuf. Technol. Part B Adv. Packag., 25, 211 (2002)
  3. Dorey RA, Whatmore RW, J. Electroceram., 12, 19 (2004)
  4. Haily E, Bih L, Bouari AE, Lahmar A, Elmarssi M, Manoun B, Mater. Chem. Phys., 241, 122434 (2020)
  5. Su X, Riggs BC, Tomozawa M, Nelson JK, Chrisey DB, J. Mater. Chem. A, 2, 18087 (2014)
  6. Su X, Tomozawa M, Nelson JK, Chrisey DB, J. Mater. Sci.: Mater. Electron., 24, 2135 (2013)
  7. Hsiang HI, Hsi CS, Huang CC, Fu SL, J. Alloy. Compd., 459, 307 (2008)
  8. Li T, Segawa H, Ohashi N, Ceram. Int., 44, 13004 (2018)
  9. Kang SB, Choi MG, Jeong DY, Kong YM, Ryu J, IEEE Trans. Dielectr. Electr. Insul., 22, 1477 (2015)
  10. Du BX, Cui B, IEEE Trans. Dielectr. Electr., 23, 2116 (2016)
  11. Samal S, Lee J, Jeong DY, Kim H, Thermochim. Acta, 604, 1 (2015)
  12. Lim JH, Park CK, Cho SH, Kim JW, Kim HS, Jeong DY, Ceram. Int., 44, 10829 (2018)
  13. Cheng LQ, Xu Z, Zhao C, Thong HC, Cen ZY, Lu W, Lan Y, Wang K, RSC Adv., 8, 35594 (2018)
  14. Lim JH, Park CK, Lee YS, Kong YM, Kang KH, Kim HS, Jeong DY, Korean J. Met. Mater., 54, 164 (206)
  15. Choi S, Jeong DY, Kim H, Adv. Appl. Ceram., 117, 328 (2018)
  16. Pascual MJ, Duran A, Prado MO, Phys. Chem. Glasses, 46, 512 (2005)
  17. Khaenamkaew P, Muensit S, Bdikin IK, Kholkin AL, Mater. Chem. Phys., 102(2-3), 159 (2007)
  18. Dinulovic M, Rasuo B, FME Transactions., 37, 117 (2009)
  19. Hao XH, Zhai JW, Yao X, J. Am. Ceram. Soc., 92(5), 1133 (2009)