Journal of Vacuum Science & Technology A, Vol.17, No.5, 3057-3061, 1999
Versatile and economical specimen heater for ultrahigh vacuum applications
This note describes a simple, molded, filament-encapsulated specimen heater made from magnesium phosphate base ceramic cement that is compatible with high temperature (>1000 degrees C) operation in ultrahigh vacuum.
Keywords:THIN-FILM DEPOSITION;SUBSTRATE HEATER;ELECTRON-SPECTROSCOPY;OXIDIZING ATMOSPHERE;DESIGN;PERFORMANCE;SURFACE;GROWTH