Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.17, No.5, 3115-3117, 1999 DOI10.1116/1.582024 Export Citation Chemical vapor deposition of barium strontium titanate films using a single mixture of metalorganic precursors Lee JH, Park M, Rhee SW Keywords:THIN-FILMS;GROWTH Please enable JavaScript to view the comments powered by Disqus.
