A preparation process of a surface perturbation target was introduced in this article. Through laser interference and a nickel-electroplate process, sinusoidal surface perturbation on the photoresist and nickel plate mold with sinusoidal surface perturbation were obtained. We transferred sinusoidal perturbation on brominated polystyrene foils by a spin-coating process. By removing the brominated polystyrene foils from the nickel-plate mold, the brominated polystyrene sinusoidal surface perturbation target was obtained. The transfer precision of the sinusoidal perturbation was measured by scanning electron microscopy. The measurements showed that the surface perturbation was transferred precisely. The surface roughness on the surface perturbation target was about 15.0 nm, analyzed by an alpha-step apparatus.