Using a radio frequency remote plasma deposition process, hydrogenated amorphous carbon thin films were prepared from a variety of hydrocarbon precursors. Monomers were aliphatic chains (butane, trans-2-butene), rings (ethylcyclohexane), or aromatics (styrene, ethylbenzene), mixed with hydrogen. These films were elaborated in order to be used in inertial confinement fusion experiments with the future megajoule laser. Thickness and roughness were studied and optimized in relation of plasma parameters. Structural properties were analyzed by Fourier transform infrared, Raman diffusion, and others.