화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.18, No.3, 946-950, 2000
Synergism of transmission measurements with spectroscopic ellipsometry measurements in the analysis of a nearly opaque bimetal film stack on glass
For a bimetal stack (Pt) and (Au) which is nearly opaque, we used transmission measurements along with spectroscopic ellipsometry measurements to determine the thicknesses of each metal layer as well as the optical constants of both materials. The key role of the transmission measurements is discussed.