화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.1, 373-377, 1994
Junction Locations by Scanning-Tunneling-Microscopy - In-Air-Ambient Investigation of Passivated GaAs PN Junctions
Scanning tunneling microscopy (STM) and atomic force microscopy operating in air have been used to investigate locations of molecular-beam epitaxially grown GaAs multiple pn junctions cleaved and passivated with P2S5. Symmetrically and asymmetrically doped junctions were prepared within topographically delineated AlAs/GaAs marker regions for this in-air study of electronic junction contrast. Our results indicate that the STM-delineated junction locations do not coincide with the electrical junction locations, but rather shift into the p-type regions.