Journal of Vacuum Science & Technology B, Vol.12, No.2, 759-763, 1994
Technological Parameters Distribution Effects on the Current-Voltage Characteristics of Field Emitter Arrays
Different applications require the development of field emitters arrays (FEA). The uniformity of the emitters is an important feature of FEA. The array technological parameters distribution effects on the FEA Fowler-Nordheim (FN) current-voltage I(V) plot has been investigated based on the ideal field emitter floating sphere model. The model parameters are emitter height h, radius R, work function phi, and anode-cathode planes distance d. The array FN I(V) plot is shown to be modified in a specific way when the parameters R and h vary according to a Gaussian distribution function (DF). The array representative emitter is defined and its parameters are obtained through a parameter extraction procedure. Several analytical results are presented for parabolic DF on R. Further modeling suggestions are given.