This paper describes a localized charge deposition and imaging on a fluoride thin film with a contact mode scanning force microscope (SFM). The charge was deposited by contacting a tip of the SFM to a sample surface and by applying voltage pulses between the tip and back electrode of the sample. After applying a voltage pulse of 300 V and a pulse width of 1 ms, the attractive force image of 250X700 nm2 was obtained corresponding to the charge deposited region. Also, the stored charge was imaged over a period of 8 h. The cause for charge images to occur in elliptical patterns was estimated to be due to the deformation of the tip apex from contact to the sample surface.