Force and surface devices with tunneling sensor-scanning tunneling and atomic force microscopes-are constructed. Thermal drift, seismic and electronic noise are eliminated in precise experiments. The tunneling sensor is proved to be advantageous for large scale images and force versus distance measurements with high dynamic range and subnanometer resolution. The influence of adsorbate on scanning tunneling microscope (STM) images of graphite is demonstrated. The holes 2 nm in diameter are produced on graphite exposed at air using STM.