화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.3, 2067-2069, 1994
Nanostructuring of Porous Silicon Using Scanning-Tunneling-Microscopy
Local tip-induced compression of porous silicon layers is shown to be capable of controlled patterning of the surface using scanning tunneling microscopy (STM). STM imaging during and after the nanopatterning procedure is discussed with respect to the mechanism underlying the modification. It is shown that local cathodoluminescence characteristics can be modified by this procedure.