화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.3, 2115-2117, 1994
Spiral Growth of GaAs by Metalorganic Vapor-Phase Epitaxy
Growth spirals are observed on metalorganic vapor phase epitaxy grown GaAs surfaces by atomic force microscopy. The growth mechanism is according to the classical Burton-Cabrera-Frank theory. Spirals originate from screw dislocations. Successive turns of the steps are sent out by the dislocations. These steps are of monolayer height (0.28 nm) and the interstep distance is around 150 nm.