화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.12, No.4, 2667-2674, 1994
Dynamical Transmission Effects and Impact Ionization in Hot-Electron Transport Across Nisi2/Si(111)7X7 Interfaces
Impact ionization and interface transmission, two important processes in hot-electron transport in semiconductor structures, have been studied by ballistic electron emission microscopy (BEEM) at interfaces of NiSi2/n-Si(111)7 X 7. The analysis of BEEM spectra taken in pinholes of thin NiSi2 films allows a direct determination of the quantum yield of impact ionization in Si over a wide energy range (>7 eV). BEEM images and spectra recorded on NiSi2 terraces show evidence for the conservation of transverse momentum and a small probability for normal interface transmission up to high energies (almost-equal-to 4 eV above the Fermi energy), in accordance with dynamical calculations of the transmission probabilities.