Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3176-3181, 1994 DOI10.1116/1.587495 Export Citation Atomic-Force Microscope Tip Radius Needed for Accurate Imaging of Thin-Film Surfaces Westra KL, Thomson DJ Keywords:METROLOGY;ARTIFACTS Please enable JavaScript to view the comments powered by Disqus.