Journal of Vacuum Science & Technology B, Vol.12, No.6, 3513-3517, 1994
Novel Electrostatic Column for Ion Projection Lithography
Chalupka A,
Stengl G,
Buschbeck H,
Lammer G,
Vonach H,
Fischer R,
Hammel E,
Loschner H,
Nowak R,
Wolf P,
Finkelstein W,
Hill RW,
Berry IL,
Harriott LR,
Melngailis J,
Randall JN,
Wolfe JC,
Stroh H,
Wollnik H,
Mondelli AA,
Petillo JJ,
Leung K
