Secondary-Electron Line Scans over High-Resolution Resist Images - Theoretical and Experimental Investigation of Induced Local Electrical-Field Effects

Grella L; Difabrizio E; Gentili M; Baciocchi M; Mastrogiacomo L; Maggiora R; Capodicci L

Journal of Vacuum Science & Technology B, Vol.12, No.6, 3555-3560, 1994

Grella L, Difabrizio E, Gentili M, Baciocchi M, Mastrogiacomo L, Maggiora R, Capodicci L

Keywords:BACKSCATTERED ELECTRONS;METROLOGY