Writing Strategies of Circular Gratings for Surface-Emitting Lasers Using Focused Ion-Beam (X-Y Coordinate) and Electron-Beam (Polar Coordinate) Lithography

Fallahi M; Templeton IM; Chatenoud F; Champion G; Dion M; Barber R

Journal of Vacuum Science & Technology B, Vol.12, No.6, 3626-3630, 1994

Fallahi M, Templeton IM, Chatenoud F, Champion G, Dion M, Barber R

Keywords:DBR LASER