Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3677-3680, 1994 DOI10.1116/1.587638 Export Citation Progress in Mask Technology for Ion-Implantation Based Nanofabrication Burkard M, Griesinger UA, Menschig A, Schweizer H, Klein H, Bohm G, Trankle G, Weimann G Keywords:QUANTUM WIRES;PHOTOLUMINESCENCE Please enable JavaScript to view the comments powered by Disqus.
