Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 4038-4043, 1994 DOI10.1116/1.587426 Export Citation Modeling Image-Formation - Application to Mask Optimization Xiao JB, Khan M, Nachman R, Wallace J, Chen Z, Cerrina F Keywords:X-RAY-LITHOGRAPHY;SYSTEM Please enable JavaScript to view the comments powered by Disqus.
