Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 77-82, 1995 DOI10.1116/1.587989 Export Citation X-Ray Photoelectron-Spectroscopy and Atomic-Force Microscopy Surface Study of GaAs(100) Cleaning Procedures Song Z, Shogen S, Kawasaki M, Suemune I Keywords:GAAS-SURFACES;ANGLE;CL2 Please enable JavaScript to view the comments powered by Disqus.
