Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 821-825, 1995 DOI10.1116/1.587860 Export Citation Effects of Heavy-Atoms Added into a Resist on Energy-Absorption in X-Ray-Lithography Murata K, Yasuda M, Kawata H, Matsuda T Please enable JavaScript to view the comments powered by Disqus.
