Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 1100-1105, 1995 DOI10.1116/1.587910 Export Citation Dimensional Metrology with Scanning Probe Microscopes Griffith JE, Marchman HM, Miller GL, Hopkins LC Keywords:ATOMIC-FORCE MICROSCOPE;TIPS;RECONSTRUCTION;IMAGES Please enable JavaScript to view the comments powered by Disqus.