Cross sectional scanning electron microscopy was used to characterize the gap fill and planarization properties of DuPont experimental fluorinated polyimide FPI-45M films in Al-Cu metal gaps (0.25 to 2.0 mu m in width) and over Al-Cu metal lines/spaces (0.50/0.50 to 50/100 mu m in lines/spaces). It was found that the gap fill and planarization properties were dependent on the orientation of the lengthwise direction of the Al-Cu metal gaps and lines/spaces relative to the radius. Slightly enhanced fill is observed when gaps are parallel to the local radius. Planarization over small lines/spaces is identical regardless of their orientations. However, for large lines/spaces, planarization values are significantly higher when the line/space orientation is 90 degrees relative to the radius than those oriented 0 degrees relative to the radius.