Through the use of a commercially available computer integrated manufacturing software package, it has been shown that the efficiency of a batch reactive ion etch reactor has increased dramatically. Standard statistical process control methodology has been applied to process input parameters in eliminating the need to run periodic "process qualification tests," identify lot-to-lot variations, and to improve the scheduling of preventative maintenance functions. These techniques have shown an increase in the first pass yield, by reducing scrap, and have proven invaluable in both process development and optimization. This has in turn increased the capacity and extended the capability of the tool. These techniques are straightforward and can be applied to other tools with potentially similar results.