화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.14, No.2, 882-886, 1996
Strain-Imaging Observation of a Pb(Zr,Ti)O-3 Thin-Film
In this article I describe strain-imaging observation of a lead-zirconate-titanate film using a tunneling acoustic microscope. Strain Imaging is based on microscopically detecting fine strains generated in samples by any modulation. In piezoelectric films, the piezoelectric properties are measured with high resolution by detecting strains generated by the tip voltage. The strains are detected either as a surface displacement of the sample by the feedback loop, which keeps the tip-to-sample spacing constant, or as a vibration generated by an alternate current tip voltage by means of the acoustic transducer in the tunneling acoustic microscope. Microscopic fluctuations of properties and flexible domain structures were observed in a 70-nm-thick Pb(Zr0.5Ti0.5)O-3 film grown by reactive evaporation.