Langmuir-Blodgett films of pure peripherally substituted metal tetra(cumylphenoxy) phthalocyanines [MPc(CP)s] have been formed on substrates of silicon (Si) and interdigital electrode arrays. Films were obtained by deposition of MPc together with octadecanol as a transfer promoter. Films were then purified by extracting the transfer promoter with 1-pentanol. The resulting films have been chemically and structurally characterized using multiple internal reflection infrared spectroscopy, scanning electron microscopy, and atomic force microscopy. The removal of the promoter shows results in improved thermal stability and a smoother, and more uniform film structure.