Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.14, No.6, 3605-3605, 1996 Export Citation Deep-Etch Silicon mm-Wave-Guide Structure for the Relativistic Acceleration of Electrons (Vol 14, Pg 2524, 1996) Willke TL, Feinerman AD Please enable JavaScript to view the comments powered by Disqus.