Journal of Vacuum Science & Technology B, Vol.14, No.6, 3808-3812, 1996
Initial Images with a Partially Micromachined Scanning Electron-Microscope
The focusing properties of a microfabricated silicon electrostatic electron lens have been tested in a machine tool fabricated assembly. Images of a 200 mesh gold transmission electron microscopy wire grid at a working distance of 4 mm are being obtained in transmission. The electron source is a zirconiated tungsten thermally assisted Schottky field emitter operating at 1800 K. The electron detector is a Faraday cup. The beam is scanned over the sample using parallel plate deflectors. The silicon lens is 1.64 mm long and consists of three silicon die separated by Pyrex optical fibers. Images of the grid at magnifications >10 000 x are being obtained.