화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.2, 282-286, 1997
Spark-Gap Atomic-Emission Microscopy .2. Improvements in Resolution
Experimental methods are described which enhance performance in spark-gap atomic emission microscopy (SGAEM) experiments. SGAEM is a recent innovation that permits elemental analysis of scanning tunneling microscopy substrates with high spatial resolution while maintaining tip-surface registry. Detectable sparks have been generated with bias pulses as small as 5 V, and intense atomic emission has been observed in such sparks. Small (similar to 1 nF), high-voltage capacitors and tungsten tips prepared by thermal etching (a new technique described) have been used in these experiments to yield a SGAEM spatial resolution better than 1 mu m(2), and an absolute detection limit for Cu of less than 25 fmol.