화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.15, No.2, 431-433, 1997
Field-Emission Properties of Ta-C Films with Nitrogen Doping
We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.