Journal of Vacuum Science & Technology B, Vol.15, No.6, 2189-2192, 1997
Wall angle measurement with a scanning probe microscope employing a one-dimensional force sensor
To measure the angle of a wall, the probe of a stylus profiler must be able to reach the wall. Sample tilting substantially expands the range of wall angles accessible to a profiler, Tilting also allows flared probe tip characterizers to be used more efficiently. The balance beam force sensor used for this work was designed to permit significant sample tilting.
Keywords:METROLOGY