Journal of Vacuum Science & Technology B, Vol.16, No.1, 19-22, 1998
Microstructure of novel superhard nanocrystalline amorphous composites as analyzed by high resolution transmission electron microscopy
The recently developed, novel superhard nanocrystalline composites nc-TiN/a-Si3N4 have been investigated by means of high resolution transmission electron microscopy. The microstructure consisting of nanocrystalline TiN imbedded within a less than or equal to 1 nm thin amorphous Si3N4, the relative amount of both phases, and the TiN-crystallite size which were previously determined by means of x-ray diffraction and energy dispersive analysis of x rays have been directly confirmed.