화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.1, 60-67, 1999
Deep levels in low temperature GaAs probed by field effect deep level transient spectroscopy
Low temperature (LT) GaAs grown on semi-insulating GaAs by molecular beam epitaxy has been investigated by field effect deep level transient spectroscopy at several reverse bias fields ranging from -1x10(5) to -4x10(5) V/cm. The activation energy, capture cross section, and electron-phonon coupling parameter all have been found to be modulated by the applied field. The theories of the Schottky effect and the electron-phonon coupling effect have been considered to interpret the electron conduction mechanisms in LT GaAs.