One of the key technologies in the plasma immersion ion implantation (PIII) process is the delivery of tightly regulated high voltage, high current pulsed power to the plasma,implantation chamber. This requires a nearly ideal high voltage switch capable of operating at short pulse widths and high pulse repetition;rates. Existing switch technologies are limited in providing the ideal switching required for consistent, effective commercial Pm processes. By using new solid-state power modulators, the required power can be delivered more effectively and reliably than with the use of older, tube-based technologies such as gridded vacuum tubes, thyratrons, and pulse forming networks. Solid-state high power technology,is now available to allow PIII to be a cost-effective, commercially viable process, ready for widespread commercialization.