The integrated sensor complementary electrode (ISCE) stress mapping tool has been created for process development and characterization of blank SCALPEL masks (4-in. format). The SCALPEL mask design incorporates a 0.1-mu m-thick SST membrane with a Cr/W scattering bilayer supported by a grillage of Si struts. The ISCE was used to determine the resonant frequency and consequently the stress of each freestanding window (or membrane) created by the grillage. Discrete stress values for each window were combined to develop a stress contour map across the complete mask membrane area. The ISCE tool utilizes 120 sensor pads integrated into and multiplexed on a two-sided computer numerically controlled (CNC) milled circuit board. The gap between the sensor board and the mask is fixed so there are no moving parts. Advantages to this design are increased speed and reduced cost and size. Stress mappings for two 4-in. SCALPEL masks were completed using the integrated sensor board and results are shown. The worst case repeatability of window resonant frequency was 1.0%. A detailed uncertainty analysis of the stress mapping results is presented.