화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.17, No.6, 2827-2829, 1999
Design and implementation of a detector for on-axis electrons for enabling enhanced imaging of topographical structures
A novel electron detection scheme for use in scanning electron microscopes is presented. The detector features enhanced imaging of topographical and especially high-aspect-ratio structures by selective detection of on-axis electrons. It consists of a magnetostatic beam separator which splits the on-axis backscattered and secondary electrons from the primary electron beam without causing first-order chromatic aberrations. The design concept has been proven by experimental evaluations which demonstrate the enhanced imaging capabilities of this new detector.