Preparation of macroscopic two-dimensional ordered array of indium nanodots

Chen SH; Fei GT; Cui P; Cheng GS; Zhu Y; Zhu XG; Zeng ZY; Zhang LD

Journal of Vacuum Science & Technology B, Vol.18, No.1, 10-12, 2000

Chen SH, Fei GT, Cui P, Cheng GS, Zhu Y, Zhu XG, Zeng ZY, Zhang LD

A macroscopic two-dimensional highly ordered array of indium nanodots was achieved using a very simple method of vacuum evaporation on anodic aluminum. The ordered indium nanodots, seated on small, shallow holes of an Al template, are arranged in a rhombic pattern with a typical period of about 100 nm. The formation mechanism of the indium nanodots is discussed.

Keywords:ELECTRON-BEAM LITHOGRAPHY;INGAAS QUANTUM DOTS;EPITAXIAL-GROWTH;FABRICATION;ISLANDS;NANOWIRES;SURFACES;ALUMINA;GLASS;GAAS