화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.1, 32-36, 2000
Low-permittivity nanocomposite materials using sculptured thin film technology
The feasibility of using sculptured thin him technology to engineer multiphase low-permittivity (also called low-k) materials for microelectronic and electronic packaging applications is established via a numerical study. The chosen films are theoretically modeled as multiphase, uniaxial, dielectric nanocomposite materials and their anisotropic relative permittivity tensors are estimated using the Bruggeman formalism.