Journal of Vacuum Science & Technology B, Vol.18, No.1, 90-93, 2000
InP-based photonic micro-sensor for near field optical investigations
This article describes the fabrication process for an InP-based atomic force microscopy (AFM)-type cantilever that is equipped with a micro-photonic sensor. This cantilever, intended to be associated with a diamond supertip, will make it possible to obtain synchronous AFM and near held optical (NFO) images in a scanning operation. The mechanical, electrical and optical performance of the photonic sensor is detailed. This photonic sensor was successfully used as a photodetector. It is possible to integrate the system into a hybrid data processing circuit. Such a cantilever could be used simultaneously in;the NFO mode and in AFM operations.
Keywords:ATOMIC-FORCE-MICROSCOPY;CANTILEVER