화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.3, 1502-1506, 2000
Growth of high density self-organized (In,Ga)As quantum dots with ultranarrow photoluminescence linewidths using buried In(Ga,Al)As stressor dots
High density InAs and In0.4Ga0.6As dots were grown by molecular beam epitaxy on buried In0.4Al0.6As and In0.4Ga0.3Al0.3As stressor dots, respectively. Selective radiative recombination was achieved by engineering the band gap of the dots. Structural and luminescence measurements reveal increased size uniformity in the active region dots along with an increase in the dot density. A narrow photoluminescence linewidth of 19 meV was measured at T = 17 K.