화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.3, 1668-1671, 2000
New approach to the independent ohmic contact formation in the structures with two parallel isotype quantum wells
A method of forming a nonalloyed selective ohmic contact to a system of quantum wells with the same conductivity type is suggested. It is experimentally shown that for quantum wells in compositionally different layers (GaAs and InGaAs) such a contact with an InGaAs quantum well can be made by vacuum evaporation of aluminum on the mesa sidewalls.