화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.3, 1749-1751, 2000
Stress and defects in silicate films and glasses
Both silicate films of technological interest and commercial silicate glasses exemplify atomic networks with low defect densities. Although the films and glasses are prepared differently, they appear to exhibit many similar chemical trends. Here these trends are discussed in detail for the glasses, and features of the very large glass database which may be relevant to films are identified.