The production process of perovskite-structive titanium dioxide for of electronic materials was developed and analyzed quantitatively. In the production of titanium dioxide by the CVD method the fine powder is synthesized by the reaction of titanium tetrachloride with oxygen at high temperature. The production process of the titanium dioxide was investigated using pilot scale apparatus. Consequently, the reaction conditions suitable for powder production with uniform size are turbulent diffusion combustion between the titanium tetrachloride and the oxygen. Using this result, reasonable reactors can be designed. A fine powder of high purity titanium dioxide with sharp particle size distribution is produced by this process. We confirmed that this vapor phase oxidation process could be applied to the production of other ceramics.